most citedLow-loss Nb on Si superconducting resonators from a dual-use spintronics deposition chamber and with acid-free post-processing

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quant-ph2026★ 1 cited

Low-loss Nb on Si superconducting resonators from a dual-use spintronics deposition chamber and with acid-free post-processing

Maciej W. Olszewski, Jadrien T. Paustian, Tathagata Banerjee +13

Magnetic impurities are known to degrade superconductivity. For this reason, physical vapor deposition chambers that have previously been used for magnetic materials have generally…