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most citedControlled epitaxy of room-temperature quantum emitters in gallium nitride

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physics.app-ph2025

Tracking the creation of single photon emitters in AlN by implantation and annealing

H. B. Yağcı, E. Nieto Hernández, J. K. Cannon +6

In this study, we inspect and analyze the effect of Al implantation into AlN by conducting confocal microscopy on the ion implanted regions, before and after implantation, followed…