capacitively coupled plasma 1chaos theory 1electron heating 1lyapunov exponent 1stochastic heating 1
From the 1 of 2 linked papers with an AI index.
2 papers
physics.plasm-ph2026
Revisiting Electron Heating in Capacitively Coupled Plasma (CCP) Discharges: A Nonlinear Dynamics Perspective
Rishabh Singh, Sarveshwar Sharma, Bhooshan Paradkar +1
The paper analyzes electron heating in capacitively coupled plasma discharges by characterizing the chaotic motion of electrons using Poincaré sections and Lyapunov exponents, show…
physics.plasm-ph2026
Collisionless Bulk Electron Heating in Resonant Low-Voltage Capacitively Coupled Plasmas
Sarveshwar Sharma, Igor D. Kaganovich, Animesh Kuley +3
We investigate collisionless power absorption in resonant, lowpressure capacitively coupled plasmas (CCPs). In these radio-frequency (RF) discharges, the sheath capacitance almo…