From the 1 of 4 linked papers with an AI index.
4 papers
Revisiting Electron Heating in Capacitively Coupled Plasma (CCP) Discharges: A Nonlinear Dynamics Perspective
Rishabh Singh, Sarveshwar Sharma, Bhooshan Paradkar +1
The paper analyzes electron heating in capacitively coupled plasma discharges by characterizing the chaotic motion of electrons using Poincaré sections and Lyapunov exponents, show…
Collisionless Bulk Electron Heating in Resonant Low-Voltage Capacitively Coupled Plasmas
Sarveshwar Sharma, Igor D. Kaganovich, Animesh Kuley +3
We investigate collisionless power absorption in resonant, lowpressure capacitively coupled plasmas (CCPs). In these radio-frequency (RF) discharges, the sheath capacitance almo…
Resonantly Driven Electron Bernstein Waves in Magnetized Low-Pressure Capacitive Discharges
Deepak Gautam, Sarveshwar Sharma, Igor Kaganovich +1
The physics of capacitively coupled plasma (CCP) discharges is investigated in a mildly magnetized regime, defined by , where and denote…
Discharge properties of a magnetized cylindrical capacitively coupled plasma discharge
Akanshu Khandelwal, Dhyey Raval, Narayan Sharma +4
This work investigates the discharge properties of a cylindrical magnetized capacitive coupled plasma discharge produced between a pair of coaxial cylinders. For the purpose of dia…