most citedPerformance predictions of a focused ion beam from a laser cooled and compressed atomic beam

31 citations · 31 across the 1 of their papers we have counts for

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1 paper

physics.acc-ph2014★ 31 cited

Performance predictions of a focused ion beam from a laser cooled and compressed atomic beam

G. ten Haaf, S. H. W. Wouters, S. B. van der Geer +2

Focused ion beams are indispensable tools in the semiconductor industry because of their ability to image and modify structures at the nanometer length scale. Here we report on per…