collaborators

1 paper

cond-mat.mtrl-sci2014

Preferentially orientated E-beam TiN thin films using focused jet of nitrogen gas

R. Ramaseshan, Feby Jose, S. Rajagopalan +1

A modified electron beam evaporator has been used judiciously to synthesize TiN thin films with (111) preferred orientation. This new design involved in creating local plasma by ac…