most citedElement- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres

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cond-mat.mtrl-sci2019

Ion beam sputtering of silicon: Energy distributions of sputtered and scattered ions

Dmitry Kalanov, André Anders, Carsten Bundesmann

The properties of sputtered and scattered ions are studied for ion beam sputtering of Si by bombardment with noble gas ions. The energy distributions in dependence on ion beam para…