3 papers
physics.app-ph2026
A bulk acoustic resonator with vertical electrodes for wideband filters
Silvan Stettler, Edgar Navarro-Gesse, Carlos Collado +2
Radiofrequency (RF) front ends for current and next generation (5G and 6G) wireless communication demand acoustic filters that combine wide bandwidth, high power capability, and th…
physics.app-ph2024
Suspended lithium niobate acoustic resonators with buried electrodes for radiofrequency filtering
Silvan Stettler, Luis Guillermo Villanueva
Data rates and volume for mobile communication are ever-increasing with the growing number of users and connected devices. With the deployment of 5G and 6G on the horizon, wireless…
eess.SY2024
More-than-Moore Microacoustics: A Scalable Fabrication Process for Suspended Lamb Wave Resonators
Marco Liffredo, Federico Peretti, Nan Xu +2
Deep Ultraviolet (DUV) Photolithography is currently used to fabricate mass-scale integrated circuits (ICs). Its high throughput and resolution could benefit large-scale RF MEMS pr…