Rayleigh Wave Suppression in Al0.6Sc0.4N-on-SiC Resonators

Marco Liffredo, Silvan Stettler, Federico Peretti +1

We report on the fabrication of a Hybrid SAW/BAW resonator made of a thin layer of Sc-doped AlN (AlScN) with a Sc concentration of 40 at% on a 4H-SiC substrate. A Sezawa mode, exci…