38 citations · 38 across the 2 of their papers we have counts for
2 papers
cond-mat.mtrl-sci2024
Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS -- from combinatorial screening to piezoelectric devices
Jyotish Patidar, Kerstin Thorwarth, Thorsten Schmitz-Kempen +2
Fueled by the 5G revolution, the demand for advanced radio frequency micro-electromechanical systems (MEMS) based on AlScN is growing rapidly. However, synthesizing high-quality, t…
cond-mat.mtrl-sci2015★ 38 cited
Correlation between electric-field-induced phase transition and piezoelectricity in lead zirconate titanate films
V Kovacova, N Vaxelaire, G Le Rhun +3
We observed that electric field induces phase transition from tetragonal to rhombohedral in polycrystalline morphotropic lead zirconate titanate (PZT) films, as reported in 2011 fo…