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20052021
most citedEnhanced coherence of all-nitride superconducting qubits epitaxially grown on silicon substrate

89 citations · 284 across the 6 of their papers we have counts for

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Showing 2020Show all

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cond-mat.supr-con2020★ 13 cited

Fabrication of Deep-Sub-Micrometer NbN/AlN/NbN Epitaxial Junctions on a Si Substrate

Wei Qiu, Hirotaka Terai

We have developed a novel fabrication process for ultra-small, full-epitaxial NbN Josephson junctions on a silicon (Si) substrate. A full-epitaxial NbN/AlN/NbN tri-layer was grown…