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cond-mat.mtrl-sci2026
Interlayer-mediated catalyst engineering for ultra-high aspect ratio silicon nanostructures
Bryan Peter Jost Benz, Marco Stampanoni, Lucia Romano
Reliable and precise etching of silicon nanostructures with ultra-high aspect ratios is required in many fields. Metal assisted chemical etching (MacEtch) in vapor is a plasma-free…
cond-mat.mtrl-sci2024
Lift-off free catalyst for metal assisted chemical etching of silicon in vapour phase
Hanna Ohlin, Bryan Benz, Lucia Romano +1
Metal-assisted chemical etching of silicon is a promising method for fabricating nanostructures with a high aspect ratio. To define a pattern for the catalyst, lift-off processes a…