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physics.optics2025
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design
Clay Klein, Nicholas W. Jenkins, Yunzhe Shao +5
Extreme ultraviolet (EUV) scatterometry is an increasingly important metrology that can measure critical parameters of periodic nanostructured materials in a fast, accurate, and re…
physics.optics2025
Soft X-ray high-harmonic generation in an anti-resonant hollow core fiber driven by a 3 m ultrafast laser
Drew Morrill, Will Hettel, Daniel Carlson +15
High-harmonic upconversion driven by a mid-infrared femtosecond laser can generate coherent soft X-ray beams in a tabletop-scale setup. Here, we report on a compact ytterbium-pumpe…