2 papers
cond-mat.mes-hall2026
Graphene FET Process and Analysis Optimization in 200 mm Pilot Line Environment
Anton Murros, Miika Soikkeli, Anni Virta +5
The maturity of the chemical vapor deposition graphene-based device processing has increased from chip level demonstrations to wafer-scale fabrication in the past few years. Due to…
physics.app-ph2024
Piezoresistive PtSe pressure sensors with reliable high sensitivity and their integration into CMOS ASIC substrates
Sebastian Lukas, Nico Rademacher, SofÃa Cruces +14
Membrane-based sensors are an important market for microelectromechanical systems (MEMS). Two-dimensional (2D) materials, with their low mass, are excellent candidates for suspende…