75 citations · 123 across the 3 of their papers we have counts for
4 papers · 1 filter
Reference-free evaluation of thin films mass thickness and composition through energy dispersive x-ray spectroscopy
Andrea Pazzaglia, Alessandro Maffini, David Dellasega +2
In this paper we report the development of a new method for the evaluation of thin films mass thickness and composition based on the Energy Dispersive X-Ray Spectroscopy (EDS). The…
Atomic Layer Deposition of Cerium Dioxide Film on TiN and Si Substrates: Structural and Chemical Properties
Silvia Vangelista, Rossella Piagge, Satu Ek +3
Cerium dioxide (CeO2) thin films were deposited by atomic layer deposition (ALD) on both Si and TiN substrates. The ALD growth produces CeO2 cubic polycrystalline films on both sub…
Structural, Chemical and Optical Properties of Cerium Dioxide Film Prepared by Atomic Layer Deposition on TiN and Si Substrates
S. Vangelista, R. Piagge, S. Ek +4
Thin films of cerium dioxide (CeO2) were deposited by atomic layer deposition (ALD) at 250 °C on both Si and TiN substrates. The ALD growth produces CeO2 films with polycrystalline…
Exploiting magnetic properties of Fe doping in zirconia
Davide Sangalli, Elena Cianci, Alessio Lamperti +7
In this study we explore, both from theoretical and experimental side, the effect of Fe doping in ZrO2 (ZrO2:Fe). By means of first principles simulation we study the magnetization…