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physics.optics2012

Induced Optical Losses in Optoelectronic Devices due to Focused Ion Beam Damages

Felipe Vallini, Luís Alberto Mijan Barea, Elohim Fonseca dos Reis +2

A study of damages caused by gallium focused ion beam (FIB) into III-V compounds is presented. Potential damages caused by local heating, ion implantation, and selective sputtering…