$\text{Ab initio}$-guided X-ray photoelectron spectroscopy quantification of Ti vacancies in Ti${}_{1-\delta }$O${}_x$N${}_{1-x}$ thin films

Pavel Ondračka, Marcus Hans, Damian M. Holzapfel +3

$\text{Ab initio}$ calculations were employed to investigate the effect of oxygen concentration dependent Ti vacancies formation on the core electron binding energy shifts in cub…