19 citations · 42 across the 5 of their papers we have counts for
1 paper · 1 filter
M. Boström, S. Å. Ellingsen, I. Brevik +3
Unwanted stiction in micro- and nanomechanical (NEMS/MEMS) systems due to dispersion (van der Waals, or Casimir) forces is a significant hurdle in the fabrication of systems with m…