Erbium-implanted tellurite waveguides with low-temperature post-implantation activation and signal enhancement

Yuxuan Gao, Batoul Hashemi, Bruno L. Segat Frare +7

In this paper, we demonstrate erbium ion implantation and signal enhancement in tellurium oxide hybrid waveguides. Silicon nitride strips with a width of 2 $\mu$m and a height of 100…