32 citations · 95 across the 10 of their papers we have counts for
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cond-mat.mtrl-sci2023★ 7 cited
Reactive pulsed direct current magnetron sputtering deposition of semiconducting yttrium oxide thin film in ultralow oxygen atmosphere: A spectroscopic and structural investigation of growth dynamics
H. Arslan, I. Aulika, A. Sarakovskis +5
An experimental investigation was conducted to explore spectroscopic and structural characterization of semiconducting yttrium oxide thin film deposited at 623 K (+/- 5K) utilizing…
cond-mat.mtrl-sci2023★ 14 cited
Deposition of Ga2O3 thin films by liquid metal target sputtering
Martins Zubkins, Viktors Vibornijs, Edvards Strods +7
This paper reports on the deposition of amorphous and crystalline thin films of Ga2O3 by reactive pulsed direct current magnetron sputtering from a liquid gallium target onto fused…