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physics.plasm-ph2021★ 30 cited
Plasma asymmetry, electron and ion energy distribution function in capacitive discharges excited by tailored waveforms
Sarveshwar Sharma, Nishant Sirse, Animesh Kuley +1
Using particle-in-cell simulation technique, we investigate the plasma and ionization asymmetry, electron and ion energy distribution function in capacitive discharges excited by t…
physics.plasm-ph2021★ 23 cited
Ion energy distribution function in very high frequency capacitive discharges excited by sawtooth waveform
Sarveshwar Sharma, Nishant Sirse, Animesh Kuley +1
Tailoring ion energy distribution function (IEDF) is vital for advanced plasma processing applications. Capacitively coupled plasma (CCP) discharges excited using non-sinusoidal wa…