42 citations · 86 across the 3 of their papers we have counts for
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physics.plasm-ph2002★ 42 cited
Effect of Electron Energy Distribution Function on Power Deposition and Plasma Density in an Inductively Coupled Discharge at Very Low Pressures
Badri Ramamurthi, Demetre J. Economou, Igor D. Kaganovich
A self-consistent 1-D model was developed to study the effect of the electron energy distribution function (EEDF) on power deposition and plasma density profiles in a planar induct…
physics.plasm-ph2002★ 31 cited
Effect of non-local electron conductivity on power absorption and plasma density profiles in low pressure inductively coupled discharges
Badri Ramamurthi, Demetre J. Economou, Igor D. Kaganovich
A self-consistent 1-D model was developed to study the effects of non-local electron conductivity on power absorption and plasma density profiles in a planar inductively coupled ar…