4-Pixel NbN Hot-Electron Bolometer Integrated in a Si${}_3$N${}_4$ Planar Optical Waveguide with On-Chip Fiber-Alignment Trench

N. A. Vovk, G. A. Matveev, M. A. Mumlyakov +7

In this work, we design and characterize a 4-pixel superconducting hot-electron bolometer (HEB) based on niobium nitride (NbN), integrated with individual planar silicon nitride (S…