Noise and Thermal Performance of a Sub-Attofarad Capacitance Sensor for Precision Measurements, with Applications in Gravitational Wave Detectors

S. Saraf, S. Buchman, C. Y. Lui +2

We describe the design principles, fabrication, and characterization of a precision AC resonant capacitance bridge (RCB) sensor, based on a resonant differential planar printed cir…