25 citations · 25 across the 2 of their papers we have counts for
2 papers
cond-mat.mtrl-sci2005★ 25 cited
Mechanisms of arsenic clustering in silicon
F. F. Komarov, O. I. Velichko, V. A. Dobrushkin +1
A model of arsenic clustering in silicon is proposed and analyzed. The main feature of the proposed model is the assumption that negatively charged arsenic complexes play a dominan…
cond-mat.mtrl-sci2005
Simulation of Arsenic Diffusion During Rapid Thermal Annealing of Silicon Layers Doped with Low-Energy High-Dose Ion Implantation
O. I. Velichko, A. M. Mironov, V. A. Tsurko +1
The model of transient enhanced diffusion of ion-implanted As is formulated and the finite-difference method for numerical solution of the system of equations obtained is developed…