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physics.optics2014
SiN nanobeam optomechanical crystals
Karen E. Grutter, Marcelo Davanco, Kartik Srinivasan
The development of SiN nanobeam optomechanical crystals is reviewed. These structures consist of a 350 nm thick, 700 nm wide doubly-clamped SiN nanobeam that is per…
physics.optics2014★ 241 cited
Two-dimensional phononic-photonic bandgap optomechanical crystal cavity
Amir H. Safavi-Naeini, Jeff T. Hill, Sean Meenehan +3
We present the fabrication and characterization of an artificial crystal structure formed from a thin-film of silicon which has a full phononic bandgap for microwave X-band phonons…