Anisotropic Etching of Graphite and Graphene in a Remote Hydrogen Plasma

Dorothee Hug, Simon Zihlmann, Mirko K. Rehmann +6

We investigate the etching of a pure hydrogen plasma on graphite samples and graphene flakes on SiO${}_2$ and hexagonal Boron-Nitride (hBN) substrates. The pressure and distance depe…