27 citations · 29 across the 2 of their papers we have counts for
2 papers
physics.ins-det2015★ 27 cited
High speed control of electro-mechanical transduction Advanced Drive Techniques for Optimized Step-and-Settle Response of MEMS Micromirrors
Matthias Imboden, Jackson Chang, Corey Pollock +6
Micro/Nano Electro Mechanical Systems (MEMS/NEMS) provide the engineer with a powerful set of solutions to a wide variety of technical challenges. However, because they are mechani…
cond-mat.mes-hall2013★ 2 cited
Atomic Calligraphy: The Direct Writing of Nanoscale Structures using MEMS
Matthias Imboden, Han Han, Jackson Chang +4
We present a micro-electromechanical system (MEMS) based method for the resist free patterning of nano-structures. Using a focused ion beam (FIB) to customize larger MEMS machines,…