Reversing Hydrogen-Related Loss in $\hat{I}\pm$-Ta Thin Films for Quantum Device Fabrication

D. P. Lozano, M. Mongillo, B. Raes +10

$\hat{I}\pm$-Tantalum ($\hat{I}\pm$-Ta) is an emerging material for superconducting qubit fabrication due to the low microwave loss of its stable native oxide. However, hydrogen absorption during…