Jaehoon Kim

collaborators

3 papers

cond-mat.mtrl-sci2026

Atomic-Scale Mechanisms of SiO $_{2}$ Plasma-Enhanced Chemical Vapor Deposition Revealed by Molecular Dynamics with a Machine-Learning Interatomic Potential

Jaehoon Kim, Minseok Moon, Hyunsung Cho +5

Plasma-enhanced chemical vapor deposition (PECVD) of silicon dioxide (SiO $_{2}$ ) is widely used for low-temperature fabrication of dielectric thin films, yet its atomic-scale growth…

cond-mat.mtrl-sci2025

Atomistic Insights into Cu/amorphous-Ta $_{x}$ N Interfacial Adhesion via Machine Learning Interatomic Potentials: Effects of Stoichiometry and Interface Construction

Jeong Min Choi, Jaehoon Kim, Ji-Hwan Lee +2

Accurate understanding and control of interfacial adhesion between Cu and Ta $_{x}$ N diffusion barriers are essential for ensuring the mechanical reliability and integrity of Cu inter…

cond-mat.mtrl-sci2025

Atomistic insights into hydrogen migration in IGZO from machine-learning interatomic potential: linking atomic diffusion to device performance

Hyunsung Cho, Minseok Moon, Jaehoon Kim +6

Understanding hydrogen diffusion is critical for improving the reliability and performance of oxide thin-film transistors (TFTs), where hydrogen plays a key role in carrier modulat…

Atomic-Scale Mechanisms of SiO2​ Plasma-Enhanced Chemical Vapor Deposition Revealed by Molecular Dynamics with a Machine-Learning Interatomic Potential

Atomistic Insights into Cu/amorphous-Tax​N Interfacial Adhesion via Machine Learning Interatomic Potentials: Effects of Stoichiometry and Interface Construction

Atomistic insights into hydrogen migration in IGZO from machine-learning interatomic potential: linking atomic diffusion to device performance

Atomic-Scale Mechanisms of SiO $_{2}$ Plasma-Enhanced Chemical Vapor Deposition Revealed by Molecular Dynamics with a Machine-Learning Interatomic Potential

Atomistic Insights into Cu/amorphous-Ta $_{x}$ N Interfacial Adhesion via Machine Learning Interatomic Potentials: Effects of Stoichiometry and Interface Construction