Lithography-free patterning of SrTiO${}_3$-based two-dimensional electron gases using direct atomic layer processing

Anshu Gupta, Karolis Parfeniukas, Amit Chanda +5

We present a scalable and lithography-free strategy for the realization of a two-dimensional electron gas (2DEG) in TiO${}_2$-patterned SrTiO${}_3$ (100) via Al deposition using magnet…