most citedLimitations of X-ray reflectometry in the presence of surface contamination

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cond-mat.mtrl-sci2014

Reproducible x-ray reflectometry optimization: statistical analysis of differential evolution fitting of multilayer structural models

Donald Windover, David Gil, Yasushi Azuma +1

We test the reproducibility of X-ray reflectometry(XRR) measurements and optimizations using an National Metrology Institute of Japan (NMIJ)/National Institute of Advanced Industri…