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cond-mat.mes-hall2012
Comb-drive MEMS Oscillators for Low Temperature Experiments
M. Gonzalez, P. Zheng, E. Garcell +2
We have designed and characterized micro-electro-mechanical systems (MEMS) for applications at low temperatures. The mechanical resonators were fabricated using a surface micromach…
cond-mat.mes-hall2005★ 32 cited
Supernarrow spectral peaks near a kinetic phase transition in a driven, nonlinear micromechanical oscillator
C. Stambaugh, H. B. Chan
We measure the spectral densities of fluctuations of an underdamped nonlinear micromechanical oscillator. By applying a sufficiently large periodic excitation, two stable dynamical…