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cond-mat.mtrl-sci2012
High resolution SIMS depth profiling of nanolayers
S. V. Baryshev, A. V. Zinovev, C. E. Tripa +4
We report results of high-resolution TOF SIMS (time of flight secondary ion mass spectrometry) depth profiling experiments on a nanolayered structure, a stack of 16 alternating MgO…
cond-mat.mtrl-sci2012★ 22 cited
White Light Interferometry for Quantitative Surface Characterization in Ion Sputtering Experiments
S. V. Baryshev, A. V. Zinovev, C. E. Tripa +2
White light interferometry (WLI) can be used to obtain surface morphology information on dimensional scale of millimeters with lateral resolution as good as ~1 μm and depth resolut…