Low cross-plane thermal conductivity of $\kappa$-Ga${}_2$O${}_3$ thin films

Seungwon Park, Jingyu Tang, Minsung An +4

The thermal conductivities of (001) $\kappa$-Ga${}_2$O${}_3$ thin films deposited on $c$-plane sapphire substrates were measured with frequency-domain thermoreflectance (FDTR). The thermal…