BIC-Engineered Silicon Nitride Microring Resonators Enabled by an Etch-Free Laser-Writing Approach

Leila Hajshahvaladi, Mohammad Amin Salmani, Media Abbasi +3

We report the initial experimental demonstration of a complementary, etch-free approach with fewer fabrication steps, in useful SU-8 ridges written by direct ultraviolet laser lith…