Comprehensive Acoustic Characterization of a Broadband Lateral MEMS Ultrasonic Transducer by Near-Field Acoustic Holography and Coupled Multiphysics Simulation

Anton Melnikov, Adrian Alexander, Tenia Meisel +1

Broadband airborne ultrasonic transducers are attractive for applications such as ranging, echo-location, and acoustic material characterization, where wide bandwidths enable advan…