2 papers
physics.app-ph2022
Different textured PZT thin films grown on a single SiO2/Ti/Pt stack for piezo MEMS applications
Antony Jeyaseelan A, Vijayendra Shastri, Kaustav Roy +1
For the past two decades piezo MEMS technology are emerging for its low power consumption of ultrasonic sensing and actuation devices for biomedical applications. Still researchers…
physics.flu-dyn2012
Contribution of Acoustic Losses in the Quality Factor of a Micromechanical Resonator
Santhosh D. Vishwakarma, A. K. Pandey, J. M. Parpia +1
A semi-analytical study of the acoustic radiation losses associated with various transverse vibration modes of a micromechanical (MEMS) annular resonator is presented. The quality…