Stoichiometry and Thickness of Epitaxial SrTiO${}_3$ on Silicon (001): an Investigation of Physical, Optical and Electrical Properties

Andries Boelen, Marina Baryshnikova, Anja Ulrich +4

Strontium titanate (SrTiO${}_3$, STO) stands out as a promising material for various electronic applications thanks to its exceptional dielectric properties. Molecular beam epitaxy…