Efficient Patch-Based Anomaly Detection Fused with Diffusion Driven Generative Modeling for Semiconductor Wafer Bin Map Open Set Anomaly Detection

Limon Bin Hossain, Md Sadib Rahman Ananta

Spatial defect signatures on wafer bin maps (WBMs) trace yield loss to specific process faults, yet supervised classifiers recognize only the defect types seen during training, and…