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cs.CV2024
Advancing SEM Based Nano-Scale Defect Analysis in Semiconductor Manufacturing for Advanced IC Nodes
Bappaditya Dey, Matthias Monden, Victor Blanco +2
In this research, we introduce a unified end-to-end Automated Defect Classification-Detection-Segmentation (ADCDS) framework for classifying, detecting, and segmenting multiple ins…
cs.CV2024
An Evaluation of Continual Learning for Advanced Node Semiconductor Defect Inspection
Amit Prasad, Bappaditya Dey, Victor Blanco +1
Deep learning-based semiconductor defect inspection has gained traction in recent years, offering a powerful and versatile approach that provides high accuracy, adaptability, and e…
cs.CV2024
Addressing Class Imbalance and Data Limitations in Advanced Node Semiconductor Defect Inspection: A Generative Approach for SEM Images
Bappaditya Dey, Vic De Ridder, Victor Blanco +2
Precision in identifying nanometer-scale device-killer defects is crucial in both semiconductor research and development as well as in production processes. The effectiveness of ex…