Ablation of black-Si by (Gauss-)Bessel femtosecond laser beams

Nan Zheng, Hsin-Hui Huang, Nguyen Hoai An Le +7

Laser machining and modification of black-Si (b-Si) by femtosecond laser Gaussian (G-) and Gauss-Bessel (GB-) beams are compared at a wavelength of 1030 nm. The GB-beam was generat…