38 citations · 47 across the 2 of their papers we have counts for
2 papers
cond-mat.mtrl-sci1997★ 38 cited
Dopant Spatial Distributions: Sample Independent Response Function And Maximum Entropy Reconstruction
D. P. Chu, M. G. Dowsett
We demonstrate the use of maximum entropy based deconvolution to reconstruct boron spatial distribution from the secondary ion mass spectrometry (SIMS) depth profiles on a system o…
cond-mat.mtrl-sci1996★ 9 cited
Characterization of the Noise in Secondary Ion Mass Spectrometry Depth Profiles
D. P. Chu, M. G. Dowsett, G. A. Cooke
The noise in the depth profiles of secondary ion mass spectrometry (SIMS) is studied using different samples under various experimental conditions. Despite the noise contributions…