1.5k citations · 1.6k across the 2 of their papers we have counts for
2 papers
quant-ph2000★ 127 cited
Quantum interferometric optical lithography:towards arbitrary two-dimensional patterns
Pieter Kok, Agedi N. Boto, Daniel S. Abrams +3
As demonstrated by Boto et al. [Phys. Rev. Lett. 85, 2733 (2000)], quantum lithography offers an increase in resolution below the diffraction limit. Here, we generalize this proced…
quant-ph1999★ 1.5k cited
Quantum Interferometric Optical Lithography: Exploiting Entanglement to Beat The Diffraction Limit
Agedi N. Boto, Pieter Kok, Daniel S. Abrams +3
Classical, interferometric, optical lithography is diffraction limited to writing features of a size lambda/2 or greater, where lambda is the optical wavelength. Using nonclassical…