Small-Data Machine Learning Uncovers Decoupled Control Mechanisms of Crystallinity and Surface Morphology in $\beta$-Ga2O3 Epitaxy

Min Peng, Yuanjun Tang, Dianmeng Dong +12

The ultrawide-bandgap semiconductor $\beta$-Ga2O3 holds exceptional promise for next-generation power electronics and deep-ultraviolet optoelectronics, yet its widespread application i…