most citedSelf-aligned fabrication process for silicon quantum computer devices

8 citations · 8 across the 1 of their papers we have counts for

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1 paper

cond-mat2002★ 8 cited

Self-aligned fabrication process for silicon quantum computer devices

T. M. Buehler, R. P. McKinnon, N. E. Lumpkin +6

We describe a fabrication process for devices with few quantum bits (qubits), which are suitable for proof-of-principle demonstrations of silicon-based quantum computation. The dev…