91 citations · 137 across the 2 of their papers we have counts for
2 papers
cond-mat.mtrl-sci2004★ 46 cited
Multi-Dot Floating-Gates for Nonvolatile Semiconductor Memories - Their Ion Beam Synthesis and Morphology
T. Müller, C. Bonafos, K. -H. Heinig +9
Scalability and performance of current flash memories can be improved substantially by replacing the floating poly-Si gate by a layer of Si dots. This multi-dot layer can be fabric…
cond-mat.mtrl-sci2002★ 91 cited
Size and Location Control of Si Nanocrystals at Ion Beam Synthesis in Thin SiO2 Films
Torsten Mueller, Karl-Heinz Heinig, Wolfhard Moeller
Binary collision simulations of high-fluence 1 keV Si ion implantation into 8 nm thick SiO2 films on (001)Si were combined with kinetic Monte Carlo simulations of Si nanocrystal (N…