most citedBCB Based Packaging for Low Actuation Voltage RF MEMS Devices

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physics.class-ph2007★ 1 cited

BCB Based Packaging for Low Actuation Voltage RF MEMS Devices

David Peyrou, Fabienne Pennec, Hikmat Achkar +4

This paper outlines the issues related to RF MEMS packaging and low actuation voltage. An original approach is presented concerning the modeling of capacitive contacts using multip…