Spectroscopic investigation of quantum confinement effects in ion implanted silicon-on-sapphire films

Rajesh Kumar, H. S. Mavi, A. K. Shukla

Crystalline Silicon-on-Sapphire (SOS) films were implanted with boron (B${}^{+}$) and phosphorous (P${}^{+}$) ions. Different samples, prepared by varying the ion dose in the range $10^{14…