2 papers
cond-mat.mes-hall2010
HFinFET: A Scalable, High Performance, Low Leakage Hybrid N-Channel FET
Kausik Majumdar, Prashant Majhi, Navakanta Bhat +1
In this letter we propose the design and simulation study of a novel transistor, called HFinFET, which is a hybrid of a HEMT and a FinFET, to obtain excellent performance and good…
cond-mat.mtrl-sci2009
Wafer-Scale, Sub-5 nm Junction Formation by Monolayer Doping and Conventional Spike Annealing
Johnny C. Ho, Roie Yerushalmi, Gregory Smith +5
We report the formation of sub-5 nm ultrashallow junctions in 4 inch Si wafers enabled by the molecular monolayer doping of phosphorous and boron atoms and the use of conventional…